Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films.
Identifieur interne : 000138 ( Main/Exploration ); précédent : 000137; suivant : 000139Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films.
Auteurs : RBID : pubmed:24264622Abstract
Two closely related mononuclear homoleptic indium-tris-guanidinate complexes have been synthesized and characterized as precursors for atomic layer deposition (ALD) of In2O3. In a water assisted ALD process, high quality In2O3 thin films have been fabricated for the first time using the new class of precursors as revealed by the promising ALD growth characteristics and film properties.
DOI: 10.1039/c3dt52746h
PubMed: 24264622
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en">Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films.</title><author><name sortKey="Gebhard, M" uniqKey="Gebhard M">M Gebhard</name><affiliation wicri:level="1"><nlm:affiliation>Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr University Bochum, Universitätsstr. 150, 44780 Bochum, Germany. anjana.devi@rub.de.</nlm:affiliation><country xml:lang="fr">Allemagne</country><wicri:regionArea>Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr University Bochum, Universitätsstr. 150, 44780 Bochum</wicri:regionArea><wicri:noRegion>44780 Bochum</wicri:noRegion></affiliation></author><author><name sortKey="Hellwig, M" uniqKey="Hellwig M">M Hellwig</name></author><author><name sortKey="Parala, H" uniqKey="Parala H">H Parala</name></author><author><name sortKey="Xu, K" uniqKey="Xu K">K Xu</name></author><author><name sortKey="Winter, M" uniqKey="Winter M">M Winter</name></author><author><name sortKey="Devi, A" uniqKey="Devi A">A Devi</name></author></titleStmt><publicationStmt><date when="2014">2014</date><idno type="doi">10.1039/c3dt52746h</idno><idno type="RBID">pubmed:24264622</idno><idno type="pmid">24264622</idno><idno type="wicri:Area/Main/Corpus">000281</idno><idno type="wicri:Area/Main/Curation">000281</idno><idno type="wicri:Area/Main/Exploration">000138</idno></publicationStmt></fileDesc><profileDesc><textClass></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Two closely related mononuclear homoleptic indium-tris-guanidinate complexes have been synthesized and characterized as precursors for atomic layer deposition (ALD) of In2O3. In a water assisted ALD process, high quality In2O3 thin films have been fabricated for the first time using the new class of precursors as revealed by the promising ALD growth characteristics and film properties.</div></front></TEI><pubmed><MedlineCitation Owner="NLM" Status="In-Process"><PMID Version="1">24264622</PMID><DateCreated><Year>2013</Year><Month>12</Month><Day>16</Day></DateCreated><Article PubModel="Print-Electronic"><Journal><ISSN IssnType="Electronic">1477-9234</ISSN><JournalIssue CitedMedium="Internet"><Volume>43</Volume><Issue>3</Issue><PubDate><Year>2014</Year><Month>Jan</Month><Day>21</Day></PubDate></JournalIssue><Title>Dalton transactions (Cambridge, England : 2003)</Title><ISOAbbreviation>Dalton Trans</ISOAbbreviation></Journal><ArticleTitle>Indium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films.</ArticleTitle><Pagination><MedlinePgn>937-40</MedlinePgn></Pagination><ELocationID EIdType="doi" ValidYN="Y">10.1039/c3dt52746h</ELocationID><Abstract><AbstractText>Two closely related mononuclear homoleptic indium-tris-guanidinate complexes have been synthesized and characterized as precursors for atomic layer deposition (ALD) of In2O3. In a water assisted ALD process, high quality In2O3 thin films have been fabricated for the first time using the new class of precursors as revealed by the promising ALD growth characteristics and film properties.</AbstractText></Abstract><AuthorList CompleteYN="Y"><Author ValidYN="Y"><LastName>Gebhard</LastName><ForeName>M</ForeName><Initials>M</Initials><Affiliation>Inorganic Materials Chemistry, Faculty of Chemistry and Biochemistry, Ruhr University Bochum, Universitätsstr. 150, 44780 Bochum, Germany. anjana.devi@rub.de.</Affiliation></Author><Author ValidYN="Y"><LastName>Hellwig</LastName><ForeName>M</ForeName><Initials>M</Initials></Author><Author ValidYN="Y"><LastName>Parala</LastName><ForeName>H</ForeName><Initials>H</Initials></Author><Author ValidYN="Y"><LastName>Xu</LastName><ForeName>K</ForeName><Initials>K</Initials></Author><Author ValidYN="Y"><LastName>Winter</LastName><ForeName>M</ForeName><Initials>M</Initials></Author><Author ValidYN="Y"><LastName>Devi</LastName><ForeName>A</ForeName><Initials>A</Initials></Author></AuthorList><Language>eng</Language><PublicationTypeList><PublicationType>Journal Article</PublicationType></PublicationTypeList><ArticleDate DateType="Electronic"><Year>2013</Year><Month>11</Month><Day>22</Day></ArticleDate></Article><MedlineJournalInfo><Country>England</Country><MedlineTA>Dalton Trans</MedlineTA><NlmUniqueID>101176026</NlmUniqueID><ISSNLinking>1477-9226</ISSNLinking></MedlineJournalInfo></MedlineCitation><PubmedData><History><PubMedPubDate PubStatus="aheadofprint"><Year>2013</Year><Month>11</Month><Day>22</Day></PubMedPubDate><PubMedPubDate PubStatus="epublish"><Year>2013</Year><Month>12</Month><Day>10</Day></PubMedPubDate><PubMedPubDate PubStatus="entrez"><Year>2013</Year><Month>11</Month><Day>23</Day><Hour>6</Hour><Minute>0</Minute></PubMedPubDate><PubMedPubDate PubStatus="pubmed"><Year>2013</Year><Month>11</Month><Day>23</Day><Hour>6</Hour><Minute>0</Minute></PubMedPubDate><PubMedPubDate PubStatus="medline"><Year>2013</Year><Month>11</Month><Day>23</Day><Hour>6</Hour><Minute>0</Minute></PubMedPubDate></History><PublicationStatus>ppublish</PublicationStatus><ArticleIdList><ArticleId IdType="doi">10.1039/c3dt52746h</ArticleId><ArticleId IdType="pubmed">24264622</ArticleId></ArticleIdList></PubmedData></pubmed></record>Pour manipuler ce document sous Unix (Dilib)
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